The triboelectric-based nanogenerator (TENG), a member of the electrostatic mechanical energy harvesters (EMEH) family, used in applications ranging from self-powered nano-systems to self-powered electrochemistry to human-machine interaction, far beyond those of the original energy harvesting device. After undergoing X-ray diffraction (XRD), atomic force microscopy (AFM), and electrical investigations, it has been shown that all thin films may be formed in the necessary rutile or anatase phase with adequate architectures. By combining the triboelectric effect with electrostatic induction, waste mechanical energy may be captured in TENGs. In present study, TiO2 thin films deposited on Si-substrate via magnetron sputtering method was investigated in a range of temperature (Room temperature, 773 K, 973 K and 1173 K) with high vacuum annealed process. It was found that TiO2 thin film 100 nm thick annealed at 1173 K provided the optimum triboelectric material performance. It has lately centered on the semiconductor material TiO2 by creating novel materials for TENGs as active layers and device topologies to reveal their underlying processes. As a positive-type friction layer for the TENGs, a polyethylene terephthalate/indium tin oxide (PET/ITO) film was utilized for effective collection via the contact separation mode. The TENG, while operating in the TiO2-based contact separation mode, yielded 55 V output voltage with good mechanical stability and the greatest peak power density (27 µW.m-2).
Anahtar Kelimeler: Triboelectric Effect (TEE), PET/ITO, Triboelectric-based Nanogenerator (TENG), Electrostatic Mechanical Energy Harvesters (EMEH)